Fused Silica
Density：2.20±0.02g/cm^3
Transmission：≥92%@193nm；≥98%@248nm
Homogeneity：±（2-10）×10^-6
Stress birefringence：2-5nm/cm
| Size | Range of sizes | Perpendicular | Surface Quality S/D | Flatness | Angle tolerance | Parallelism | CA |
| Small | 5×5-10×10mm | 1′ | 20/10-60/40 | λ/4-λ/10 | 2″-60″ | 2″-3′ | 90% |
| Medium | 20×20-50×50mm | 1′ | 20/10-60/40 | λ/4-λ/10 | 2″-60″ | 2″-3′ | 90% |
| Large | 60×60-100×100mm | 1′ | 40/20-80/50 | λ/4-λ/10 | 2″-60″ | 2″-3′ | 90% |
