Fused Silica
Density：2.20±0.02g/cm^3
Transmission：≥92%@193nm；≥98%@248nm
Homogeneity：±（2-10）×10^-6
Stress birefringence：2-5nm/cm
| Size | Diameter | Dia.-Thick Ratio | Radius of curvature | Opening angle | ΔR | Surface Quality S/D | Flatness | ETV |
| Small | φ10-φ25mm | 5:1 | ≥35mm | ≤60° | A | 20-10 | N≤2 Δ≤0.5 | 0.05 |
| Medium | φ25-φ100mm | 5:1 | ≥35mm | ≤60° | A | 20-10 | N≤2/φ60mm ΔN≤0.5/φ60mm | 0.05 |
| Large | φ100-φ295mm | 5:1 | ≥120mm | ≤60° | A | 40-20 | N≤2/φ60mm ΔN≤0.5/φ60mm | 0.05 |
