Silicon
Density：2.329g/cm^3
Transmission：＞52%
Resistivity：0-10000Ω/cm
Conductivity type：N-type or P-type
| Type | Size | Diagonal | Dia.-Thick Ratio | Surface Quality S/D | Flatness PV@632.8nm | Roughness RMS | Parallelism |
| Square | Small | 10-25mm | 10:1 | 5-1 | 0.05λ | ≤0.1nm | 10″ |
| Medium | 25-100mm | 10:1 | 10-5 | 0.05λ | ≤0.1nm | 10″ | |
| Large | 100-295mm | 10:1 | 20-10 | 0.05λ/φ100 | ≤0.1nm | 3″ | |
| Type | Size | Diameter | Dia.-Thick Ratio | Surface Quality S/D | Flatness PV@632.8nm | Roughness RMS | Parallelism |
| Circular | Small | φ10-φ25mm | 10:1 | 5-1 | 0.05λ | ≤0.1nm | 10″ |
| Medium | φ25-φ100mm | 10:1 | 10-5 | 0.05λ | ≤0.1nm | 10″ | |
| Large | φ100-φ295mm | 10:1 | 20-10 | 0.05λ/φ100 | ≤0.1nm | 3″ |
